Kayex Crystal Growing Technology

Kayex CG6000 Stretch Silicon Crystal Growing Furnace

Specifications

Physical Dimensions

The physical dimensions given in the tables are for the standard CG6000 Stretch configuration. Optional equipment (semi-continuous feeder, vacuum system modifications, etc.) may extend beyond these dimensions.

The approximate total machine weight is 10,000 pounds (4545 kg).

Overall Physical Dimensions

  Height Width Depth
Furnace (open) 212.0 in.
(5.39 m)		 74 in.
(1.88 m)		 117.6 in.
(2.99 m)
Control Console 63 in.
(1.60 m)		 26 in.
(0.66 m)		 36 in.
(0.91 m)
Power Supply 37 in.
(0.94 m)		 35 in.
(0.89 m)		 48 in.
(1.22 m)
Vacuum Pumps
Main Pump (KLRC-300) 40 in.
(1.02 m)		 40 in.
(1.02 m)		 90 in.
(2.29 m)
Auxiliary Pump (KTC-112) 49 in.
(1.24 m)		 34 in.
(0.86 m)		 39 in.
(0.99 m)

Growth Chamber Construction

Pull Chamber

All Growth chambers (furnace tanks, pull chamber, furnace tank cover, base plate, and isolation valve) are constructed of 304L stainless steel. All chambers are inspected to be free of defects and dye penetrant tested. All are also pressure tested and leak checked using a helium mass spectrometer leak detector.

Base Plate: The base plate is a flat design. It is double walled and water cooled. Four electrode feed throughs and a water cooled flange area are provided for the crucible lift bellows attachment.

Electrode Spacing: 90° apart on 11" (279 mm) radius

Electrode Diameter: 1.75" (44.5 mm)

Electrode Material: 304L Stainless Steel, Water Cooled

Upper and Lower Furnace Tanks

The furnace tanks are double walled cylindrical construction with flanged ends and are water cooled. The upper furnace tank provides a pyrometer port for heater temperature measurement. The lower furnace tank provides ports for evacuation and pressure sensors. The lower tank remains on the base plate during normal cleaning operations, providing a contained area and maintaining the tank to base plate seal.

Furnace tank I.D.: 30.0" (762 mm)

Furnace tank height (upper and lower combined): 42.0" (1067 mm)

Furnace Tank Cover

The furnace tank cover provides the transition between the furnace and the isolation valve area. The cover is a double walled, water cooled, flat plate construction. The cover provides ports for operator viewing (1), diameter control (1), and melt level control (2). The operator viewport is 9" wide to allow crystal diameter measurement up to 8". Argon inlet ports are provided in the throat area of the cover.

Isolation Valve

The isolation valve is provided to allow access to the pull chamber, and thereby the seed or crystal, while maintaining partial pressure and temperature of the furnace tank. The valve is a "flapper" type, simplifying operation and allowing easy access for cleaning. The valve body and plate are double walled and water cooled.

Isolation ValveIsolation valve I.D.: 10" (254 mm)

Isolation valve height
(open): 14.88" (378 mm)
(closed): 4.62" (117 mm)

Pull Chamber

The pull chamber has a full length flanged door on a cylindrical chamber. It is double walled and water cooled. The door allows safe and easy access to the seed or crystal for removal or replacement. Viewports are provided for seed position sensing (2), operator viewing (1), and melt temperature sensing (1). Argon inlet ports are provided both at the top and bottom of the chamber. A port for evacuating the pull chamber, while isolated from the furnace tank, is provided.

Pull chamber I.D. 13.0" (330 mm)
Pull chamber height 72.28" (1836 mm)
Pull chamber door opening width 11.0" (279 mm)
Pull chamber door opening height 68.13" (1730 mm)

Crucible Lift Mechanism

The crucible lift mechanism utilizes a slideway for vertical motion. This provides accuracy and rigidity beyond that of the older guide rod and linear bearing designs. The motors are enclosed DC tachmotors providing precise closed loop speed control. The high speed jog motor is a constant speed DC motor. Rotation is accomplished using a multi-V belt drive, which allows high torque while eliminating gearbelt vibration. Rotation seals are Rigaku® magnetic fluid type and vertical sealing is accomplished using a stainless steel bellows.

Crucible Lift Mechanism Operating Specifications

Lift Speed and Accuracy: 0-10 in/hr (0-254 mm/hr) ± 1% of reading or ± 0.01 in/hr (0.25 mm/hr) whichever is greater

Rotation Speed and Accuracy: 0-30 RPM ± 1% of reading or ± 0.03 RPM whichever is greater

Jog Speed: 2.0 in/min (50.8 mm/min)

Total Vertical Travel: 11.5" (292 mm)

Crucible Shaft: The crucible shaft is a hollow shaft, water cooled, and constructed of 304L stainless steel. The end is specially designed to eliminate loosening of the graphite pedestal during heat load.

Diameter: 2.5" (63.5 mm)

Seed Lift Mechanism

KX150 Seed Lift Mechanism The seed lift mechanism houses a translating cable spool. The entire housing is rotated about a hollow shaft. The mechanism is dynamically balanced to provide vibration free operation throughout its entire operating range. The rotation seal and lift motion feedthrough seal are Rigaku® magnetic fluid type. The main housing is constructed of aluminum. The motors are enclosed DC tachmotors providing precise closed loop speed control. The high speed jog motor is a constant speed DC motor. Rotation is accomplished using a multi-V belt drive, which allows high torque while eliminating gearbelt vibration.

Seed Lift Operating Specifications

Lift Speed and Accuracy 0-20 in/hr (0-508 mm/hr) ± 1% of reading
or ± 0.02 in/hr (0.51 mm/hr) whichever is greater
Rotation Speed and Accuracy 0-50 RPM ± 1% or ± 0.05 RPM whichever is greater
Jog Speed 20 in/min (508 mm/min)
Total Vertical Travel 121" (3073 mm)

Cable Specifications

The cable is a counterwound 302 stainless steel 19 X 7 construction. The cable, ball and eyelet meet military specifications and the assembly is proof load tested to 435 lbs (198 kg).

Nominal Diameter 0.078" (1.98 mm)
Overall Length 150.0" (3810 mm)

Vacuum System

Vacuum system components are constructed of stainless steel. All connections are flange type with Viton® o-ring seals. Vacuum valves are high vacuum, pneumatic operated ball valves.

Main Vacuum System

The main vacuum system provides the plumbing and valves to evacuate the growth chambers, or the furnace tank only if the isolation valve is closed. A pressure control throttle valve is provided to control growth chamber pressure independently of gas flow.

Furnace Tank Line Size 2.5" (63.5 mm) O.D.
Main Line Size 3" (76.2 mm) O.D.
Pressure Control Range

@ 100 slpm argon flow

8-95 torr (estimated)
Overall Pressure Control Range

@ 2-100 slpm argon flow

1-95 torr (estimated)

Auxiliary (Pull Chamber) Vacuum System

The auxiliary vacuum system provides the plumbing and valves to evacuate the pull chamber from atmosphere to equalize pressure with the furnace tank. It is used primarily during the isolation process. A high vacuum gum rubber hose provides the flexible connection for lifting and rotating the pull chamber.

Pull Chamber Line Size 1.0" (25.4 mm) O.D.

Main Vacuum Pump

The main vacuum pump is a Kinney model Air Ejector/KLRC-300 KFS FSR Special. It is a two stage Ejector/Liquid Ring Pump Vacuum System with FSR (Full Sealant Recovery) and a heat exchanger. The peak displacement at rated RPM is 300 ft3/min.

Auxiliary Vacuum Pump

The auxiliary vacuum pump is a Kinney model KTC-112. The displacement at rated RPM is 107 ft3/min.

Seals

All stationary chamber seals are Viton® o-rings. Rotation seals for the seed lift mechanism and crucible lift mechanism are Rigaku® magnetic fluid type. The rotary seal for the isolation valve is a quad ring type.

Vacuum Integrity

The entire furnace is checked for vacuum integrity using a helium mass spectrometer leak detector. Leak rates are less than 0.5 X 10-8 Standard cc/sec He.

Ultimate Pressure 10 mtorr max.
Leak Rate
(Rate of Pressure Rise) 		50 mtorr/hr max.

Argon System

The argon system provides for the introduction of inert argon gas to the furnace during operation. There are two points of entry (top of the pull chamber and furnace tank cover) which are controlled by the mass flow controller and one (bottom of the pull chamber) which is not. Argon is distributed from an annular ring at the pull chamber top to reduce turbulence in the pull chamber.

Mass Flow Controller

The mass flow controller provides precise controlled flow of argon gas into the growth chambers.

Gas Flow Range: 2-100 slpm

Seals and Plumbing

The argon system is constructed of stainless steel tubing and flexible stainless steel lines. All connections are made with flanged Viton® o-ring or Parker Ultraseal seals. The entire argon system is leak tested using a helium mass spectrometer leak detector. Leak rates are less than 0.5 X 10-8 Standard cc/sec He.

Coolant System

The coolant system of the CG6000 is designed to provide a safe and comfortable operating environment. All chambers are protected against over pressurization by stainless steel pressure relief valves. External skin temperatures are monitored at critical locations to alert the operator of surfaces exceeding 140° F (60° C). Coolant flow sensors are used to shut down heater power in the event of loss of flow.

Coolant System Construction

Manifolds are constructed of stainless steel. Hoses are attached to brass barbed fittings to allow removal and replacement for maintenance. Separate fittings are supplied for power supply coolant. No valves are used in the system to prevent accidental coolant circuit isolation during operation.

Inlet Manifold Diameter: 2" (50.8 mm)

Outlet Manifold Diameter: 2" (50.8 mm)

Flow Sensors (1 supplied): Flow sensor - normally open - heater interlock

Temperature Sensors (8 supplied): Bi-metallic - normally open - visual and audio warning

CG6000 StretchFootprint

 

CG6000 Stretch Side View

 

 

CG6000 Stretch Console/Power Supply

 

 

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